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Common Electron Microscopy and Microanalysis Acronyms
	AAS Atomic Absorption Spectroscopy ACF absorption correction factor ADC analog to digital converter AED Atomic Emission Detector AEM analytical electron microscope/microscopy AES Atomic Emission Spectroscopy AES Auger electron spectroscopy AFM atomic force microscopy AFS Atomic Fluorescence Spectroscopy APSTM Analytical Photon Scanning Tunneling Microscope ATW atmospheric thin window BSE backscattered electron BSED backscattered electron diffraction BSEI backscattered electron image/imaging CB coherent bremsstrahlung CBIM convergent-beam imaging CCD charge-coupled device CFEG cold field-emission gun CL condenser lens CL cathodoluminescence CRT cathode-ray tube CTEM Conventional Transmission Electron Microscopy DP diffraction pattern DSTEM dedicated scanning transmission electron microscopy EBIC electron beam-induced current EBSD electron backscatter diffraction ECD Electron Capture Detector EDAX Energy Dispersive Analysis of X-rays EDS Energy Dispersive X-ray Spectroscopy EDX Energy Dispersive X-ray Analysis EDXF Enery Dispersive X-ray Fluorescence EELS electron energy-loss spectrometry/spectroscopy EFTEM energy filtering transmission electron microscope EI Electron Impact EM Electron Microscopy EMMA electron microscope microanalyzer EMP electron microprobe EMPA electron microprobe analysis EMS electron microscopy image simulation EPASA Electron Probe Analysis Society of America EPMA electron probe microanalyzer EPMA electron probe micro analysis EPMA electron probe microanalysis ESCA electron spectroscopy for chemical analysis ESD Electron Stimulated Desorption ESEM Environmental Scanning Electron Microscopy ESI electron spectroscopic imaging ESR Electron Spin Resonance FA Fluorescence Analysis FCF fluorescence correction factor FEG field emission gun FEM Field Emission Electron Microscopy FET field effect transistor FFEM Freeze-Fracture Electron Microscopy FFT fast Fourier transform FIM field ion microscopy FSE fast secondary electron FWHM full width at half maximum FWTM full width at tenth maximum GB grain boundary GCS generalized cross section HPGe high purity Germanium detector HREM high resolution electron microscope HRTEM high-resolution transmission electron microscope/microscopy HV high vacuum HVEM high voltage electron microscope/microscopy ICP Inductively Coupled Plasma IR infrared spectroscopy IVEM intermediate voltage electron microscope/microscopy JEOL Japanese Electron Optics Laboratory KAP potassium acid phthalate LDE1 Layered Dispertion Element 1 LDE2 Layered Dispertion Element 2 LEED low-energy electron diffraction LEEM Low Energy Electron Microscopy LIF Lithium Fluoride LM light microscopy LOD Limit Of Detection MAC mass absorption coefficient MAS Microbeam Analysis Society MCA multichannel analyzer MDM minimum detectable mass MEEM Metastable Electron Emission Microscopy MEM Mirror Electron Microscopy MLS multiple least squares fit MMF minimum mass fraction MS Mass Spectroscopy NAA Neutron Activation Analysis NIST National Institute of Standards and Technology nm nanometer NMR Nuclear Magnetic Resonance NPD Nitrogen-Phosphorous Detector OBIC Optical Beam Induced Current OES Optical Emission Spectroscopy P/B peak-to-background ratio PAP Pouchou and Pichoir PB phase boundary PB Particle Beam PEELS parallel electron energy-loss spectroscopy PEEM Photoemission Electron Microscopy PES Photoelectron Spectroscopy PET Pentaerythritol PLI Photoluminescence Imaging PMT photomultiplier tube ppb parts per billion ppm parts per million QE quantum efficiency RAP rubidum acid phthalate ratemeter REM reflection electron microscope/microscopy RHEED reflection high-energy electron diffraction S/N signal-to-noise ratio SAD selected-area diffraction SAED selected area electron diffraction SAM scanning Auger microscopy/microprobe SAXS Small-Angle X-ray Scattering SCL Spectrally Resolved Cathodoluminescence SE secondary electron SEELS serial electron energy-loss spectrometer/spectrometry SEM scanning electron microscope/microscopy SESM scanning electron spectrometric spectroscopy Si(Li) Lithium drifted silicon SIMS secondary ion mass spectrometry/spectroscopy SPEEM Scanning Photoemission Electron Microscopy SPELEEM Spectroscopic Photoemission and Low Energy Electron Microscopy SPEM Scanning Photoelectron Microscopy SPM Scanning Probe Microscopy SRM standard reference material STEM scanning transmission electron microscope/microscopy STM scanning tunneling microscope/microscopy STS Scanning Tunneling Spectroscopy STXM Scanning Transmission X-ray Microscopy SXTM Scanning X-ray Transmission Microscopy TAP Thallium Acid Phthalate TB twin boundary TED Transmission Electron Diffraction TED Thermionic Emission Detector TEM transmission electron microscope/microscopy TLE Thin Layer Electrode TOF-MS Time-Of-Flight Mass Spectrometry TXM Transmission X-ray Microscopy UHV ultrahigh vacuum UTW ultra thin window VLM visible-light microscope/microscopy WDS wavelength-dispersive WDX wavelength dispersive X-ray spectroscopy XANES X-ray absorption near-edge spectroscopy XANES X-ray absorption near-edge structure XEDS X-ray energy-dispersive XPEEM X-ray Photoemission Electron Microscopy XPLEEM X-ray Photoemission and Low Energy Electron Microscopy XPS X-ray photoelectron spectroscopy XRD X-ray diffraction XRF X-ray Fluorescence ZAF atomic number, absorption, fluorescence correction

Additional Resources
	For additional acronyms and abbreviations, consult the following: The ACS Style Guide: A Manual for Authors and Editors. Janet S. Dodd, editor. American Chemical Society, Washington, DC, 2nd edition, 1997. A Guide to Materials Characterization and Chemical Analysis. John P. Sibilia, editor. VCH Publishers, New York, 2nd edition, 1996. Instrumental Methods of Analysis. Hobart H. Willard, John A. Dean, Frank A. Settle, John Dean, and Lynne L. Merritt. Wadsworth Publishers, 7th edition, 1988.

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